Liquid crystal display device and method of manufacturing the same
US7435631B2 · kind B2 · utility
12Cited by
1References
11Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 29, 2005 |
| Grant date | Oct 14, 2008 |
| Priority date | — |
| Expiry date | Aug 31, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D86/60
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An LCD and a method of manufacturing the same using at most six mask processes are provided. An active layer and a storage electrode are simultaneously formed by diffraction exposure. Multiple ion implantations are performed using a photoresist or the gate electrode to mask different areas of an underlying semiconductor. Source and drain electrodes and a pixel electrode are simultaneously formed by diffraction exposure. First and second connection electrodes that lower the contact resistance between the drain electrode and the active layer are formed by a lift-off process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.