Thermal sensor with increased sensitivity
US7435964B2 · kind B2 · utility
11Cited by
15References
41Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 20, 2006 |
| Grant date | Oct 14, 2008 |
| Priority date | — |
| Expiry date | Oct 20, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/16235
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention provides a thermal sensor having a first and second temperature sensing elements each being formed on a thermally isolated table in a first substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.