Angular velocity sensor and method for manufacturing the same
US7436107B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 30, 2005 |
| Grant date | Oct 14, 2008 |
| Priority date | — |
| Expiry date | Apr 16, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5621
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided is an angular velocity sensor which is thin, requires no individual adjustment and can control the generation of signals that are unnecessary to the angular velocity sensor and are generated on the sensing electrodes when the tuning fork is made to vibrate in the X-axis direction, and a method for manufacturing the angular velocity sensor. Centers (8d) and (9d) of top electrodes (8c) and (9c) as components of detection units are shifted by ΔW from centers (10) and (11) of main surfaces (3a) and (3b) of arms (1a) and (1b) of the tuning fork vibrator towards side surfaces (3c) and (3e) adjacent to main surfaces (3a) and (3b), respectively.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.