Patent · US Active

SEM test apparatus

US7436177B2 · kind B2 · utility

43Cited by

86References

12Claims

0Family size

Assignee

Virgin Islands Microsystems, Inc.

Inventors

Jonathan Gorrell · Gainesville, US
Mark Davidson · Florahome, US
Jean Tokarz · Bonita Springs, US

Key dates

Filing date	May 5, 2006
Grant date	Oct 14, 2008
Priority date	—
Expiry date	Apr 4, 2027

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2813
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Test apparatus for examining the operation and functioning of ultra-small resonant structures, and specifically using an SEM as the testing device and its electron beam as an exciting source of charged particles to cause the ultra-small resonant structures to resonate and produce EMR.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.