Scanning examination apparatus, lens unit, and objective-lens adaptor
US7436562B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 15, 2006 |
| Grant date | Oct 14, 2008 |
| Priority date | — |
| Expiry date | Dec 7, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0816
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
It is possible to easily and accurately confirm the position of an optical axis of an objective lens relative to an examination site on a specimen, and positioning of the objective relative to the specimen can be carried out rapidly in a preparation stage. The invention provides scanning examination apparatus comprising a first light source; a light scanning unit configured to scan light from the first light source on a specimen; an objective lens configured to form an image of the light scanned in the light scanning unit at the specimen; a light-detecting unit configured to detect return light emitted from the specimen; a second light source configured to emit visible light; a deflecting optical element, disposed between the light scanning unit and the objective lens, for making visible light emitted from the second light source enter the objective lens along an optical axis of the objective lens; and a beam-shaping unit configured to form the visible light from the second light source, which is irradiated onto a surface of the specimen via the objective lens using the deflecting optical element, into a pattern that enables the optical axis of the objective lens to be indicated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.