Electrical connections in microelectromechanical devices
US7436573B2 · kind B2 · utility
51Cited by
10References
38Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 13, 2005 |
| Grant date | Oct 14, 2008 |
| Priority date | — |
| Expiry date | Apr 6, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49155
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micromirror device and a method of making the same are disclosed herein. The micromirror device comprises a mirror plate, hinge, and post each having an electrically conductive layer. One of the hinge, mirror plate, and post further comprises an electrically insulating layer. To enable the electrical connections between the conducting layers of the hinge, mirror plate, and post, the insulating layer is patterned.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.