Probe repair methods

US7437813B2 · kind B2 · utility

Assignee

• SV Probe Pte. Ltd. · SG

Inventors

• Bahadir Tunaboylu · Chandler, US
• John McGlory · Chandler, US
• Horst Clauberg · Whitemarsh, US
• Bruce Griffing · North Wales, US
• Robert E. Werner · Doylestown, US
• Edward Laurent · North Wales, US
• Edward L. Malantonio · Conshohocken, US
• Alan Slopey · Warrington, US
• Paul Bereznycky · Medford, US

Key dates

• Filing date: Feb 7, 2007
• Grant date: Oct 21, 2008
• Expiry date: May 2, 2027

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/49737
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method and apparatus for repairing a probe on a probe card is provided. A plurality of beams is formed on a beam panel. The plurality of beams includes a replacement beam. After identifying a damaged beam on the probe card, the damaged beam is removed from the probe card. The beam panel is aligned with the probe card. After the beam panel is aligned, the aligned beam panel is temporarily affixed to the probe card. After the beam panel is temporarily affixed to the probe card, the replacement beam is affixed at a location previously occupied by the damaged beam. After the replacement beam is affixed at the location, the beam panel is removed from the probe card.