Fabrication of long range periodic nanostructures in transparent or semitransparent dielectrics
US7438824B2 · kind B2 · utility
8Cited by
1References
45Claims
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Key dates
| Filing date | Mar 24, 2006 |
| Grant date | Oct 21, 2008 |
| Priority date | — |
| Expiry date | Jul 18, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/146
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
To make high quality long-range periodic nanostructures in a transparent or semi-transparent substrate, the transparent or semi-transparent substrate is scanned with a linearly polarized laser beam generated by a femtosecond laser and exceeding a predetermined energy/pulse threshold along a scanning path. Sub-diffraction limit structures are formed as periodic planes of modified material in the transparent or semi-transparent substrate extending along the scanning path. The modified material can then be chemically etched to form cavities.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.