Use of partially fluorinated polymers in applications requiring transparency in the ultraviolet and vacuum ultraviolet
US7438995B2 · kind B2 · utility
4Cited by
1References
31Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 14, 2002 |
| Grant date | Oct 21, 2008 |
| Priority date | — |
| Expiry date | Mar 2, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0046
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Disclosed are partially fluorinated and fully fluorinated polymers that are substantially transparent to ultraviolet radiation at wavelengths from approximately 150 nanometer to 260 nanometers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.