Patent · US Active

Direct write nanolithography using heated tip

US7439501B2 · kind B2 · utility

1Cited by

2References

23Claims

0Family size

Assignee

Georgia Tech Research Corporation · US

Inventors

William King · Washington, US
Clifford Henderson · Lilburn, US

Key dates

Filing date	Aug 30, 2006
Grant date	Oct 21, 2008
Priority date	—
Expiry date	Jun 1, 2027

Classification

Technology area (CPC G)Physics
CPC primaryG01Q80/00
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A device for sculpting a substrate includes a vertically displaceable probe having a nano-scale dimensioned probe tip. A displacement mechanism is configured to adjust a vertical displacement between the probe tip and the substrate. A heating mechanism selectively heats the probe tip to a preselected temperature that is sufficient to cause a portion of the substrate in contact with the probe tip to decompose.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.