Fast microbolometer pixels with integrated micro-optical focusing elements
US7439513B2 · kind B2 · utility
2Cited by
20References
5Claims
0Family size
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Key dates
| Filing date | Aug 16, 2005 |
| Grant date | Oct 21, 2008 |
| Priority date | — |
| Expiry date | Aug 19, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2005/0077
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Fast microbolometer pixels integrating micro-optical focusing elements are provided. Each microbolometer pixel includes a focusing element located between the pixel body and a substrate, this focusing element preferably sending radiation back towards the central portion of the microbolometer. There is also provided a microbolometer array having a plurality of such microbolometer pixels. Advantageously, to increase the pixel speed, the present microbolometers may be built smaller than the detector and no additional structures need to be attached to said detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.