Littrow interferometer
US7440113B2 · kind B2 · utility
15Cited by
19References
56Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 23, 2005 |
| Grant date | Oct 21, 2008 |
| Priority date | — |
| Expiry date | Mar 12, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D5/38
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and method for measuring displacement includes a light beam directed to an interferometer core that splits the light beam into first and second component beams. The first component beam is directed to a diffraction grating at approximately a Littrow angle. A diffraction is received by the interferometer core and is combined with the second component beam. The combination of the first and second component beams is measured to determine displacement of the diffraction grating.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.