Micro-electromechanical variable capacitor
US7440254B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 9, 2003 |
| Grant date | Oct 21, 2008 |
| Priority date | — |
| Expiry date | Feb 21, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01G4/2325
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A micro-electromechanical variable capacitor with first and second capacitor plates spaced apart to define a gap therebetween. The first plate has two control electrodes and an active electrode. The second plate is movable relative to first plate when a voltage is applied to produce a potential difference across the control electrode and the second capacitor plate. This has the effect of varying the capacitance of the capacitor. The facing surface of at least one of the plates is formed in such a way that it has a roughened surface. The degree of roughness is sufficient to prevent the facing surfaces adhering together through stiction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.