Nano tip and fabrication method of the same
US7442926B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 21, 2006 |
| Grant date | Oct 28, 2008 |
| Priority date | — |
| Expiry date | Jun 30, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/876
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention relates to a nano tip and a fabrication method of the nano tip that is generally usable in mechanical, physical, and electrical devices for detecting surface signals or chemical signals, or is usable for a source scanning energy beam.The fabrication method of a nano tip according to the present invention includes providing a supporting holder that is fixed at one end thereof to a mechanical or electrical device, bonding a carbon nanotube to the free end of the supporting holder, and modifying the property or the shape of the carbon nanotube by scanning an energy beam thereto.The nano tip, having improved stiffness and perpendicularity, is fabricated by adjusting the length, the diameter, and the shape of the end of the carbon nanotube tip attached with carbon nanotubes by means of the energy beam so that the nano tip may stably and repeatedly reproduce information of a sample and may minimize a deviation between the tips.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.