Diffractive thin-film piezoelectric light modulator and method of fabricating the same
US7443076B2 · kind B2 · utility
1Cited by
10References
6Claims
0Family size
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Key dates
| Filing date | Apr 22, 2005 |
| Grant date | Oct 28, 2008 |
| Priority date | — |
| Expiry date | Mar 11, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0858
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Disclosed herein is a diffractive thin-film piezoelectric light modulator, in which a lower protective layer is formed on a lower support to prevent the lower support from being over-etched when etching, thus increasing the surface smoothness of the lower support and of a micro-mirror. In addition, a method of fabricating the diffractive thin-film piezoelectric light modulator is also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.