Apparatus for optical measurement of an object
US7443513B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 25, 2005 |
| Grant date | Oct 28, 2008 |
| Priority date | — |
| Expiry date | Jun 19, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/245
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An apparatus for optical measurement of an object, especially for measuring movement, is provided, which includes an interferometer for measuring movements along the measurement beam of the interferometer, as well as a confocal auto-focus microscope. The interferometer is coupled in the beam path of the confocal auto-focus microscope, such that the measurement beam of the interferometer is simultaneously the focusing beam of the microscope. Here, it is guaranteed that the interferometric movement measurement is always performed at the focal point of the microscope that is used. This enables automatic correction of the Guoy effect for objectives with high numerical aperture. In addition, for the use of a scanning confocal auto-focus microscope, data sets of test objects can also be measured, which comprise their vibrational behavior, height profile, and optionally also their in-plane movement behavior.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.