Method and system for resonant operation of a reflective spatial light modulator
US7443568B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 4, 2006 |
| Grant date | Oct 28, 2008 |
| Priority date | — |
| Expiry date | Aug 1, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of activating a micro-mirror includes applying a first electrode voltage to one or more electrodes associated with the micro-mirror. The micro-mirror is positioned at a first positive deflection angle during a portion of the application of the first electrode voltage. The method also includes maintaining the first electrode voltage for a first predetermined time and applying a second electrode voltage to the one or more electrodes. The micro-mirror rotates to a first negative deflection angle during a portion of the application of the second electrode voltage. The method further includes maintaining the second electrode voltage for a second predetermined time and applying a third electrode voltage to the one or more electrodes. The micro-mirror is positioned at a second positive deflection angle greater than the first positive deflection angle during a portion of the application of the third electrode voltage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.