Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays
US7443569B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 17, 2006 |
| Grant date | Oct 28, 2008 |
| Priority date | — |
| Expiry date | Dec 15, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3548
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The invention provides a micro-electro-mechanical-system (MEMS) mirror device, comprising: a mirror having a 2-dimensional rotational T-shaped hinge at a first end, and having a flexible connection at a second end opposite the first end. The invention also provides a MEMS mirror device, comprising: a mirror having a 2-dimensional rotational T-shaped hinge at a first end; and a vertical actuator connected to the 2-dimensional T-shaped hinge through a rigid connection. The invention also provides a MEMS mirror device, comprising: a mirror connected to a first end of a rotational actuator through bending springs at a first end, and having a torsional spring at a second end opposite the first end; a movable cantilever connected to the mirror through the torsional spring; and a support structure connected to the first end and a second end of the rotational actuator through torsional springs and connected to the movable cantilever.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.