Sensors for electrochemical, electrical or topographical analysis

US7444856B2 · kind B2 · utility

Assignee

• The Board of Trustees of the Leland Stanford Junior University · US

Inventors

• Friedrich B. Prinz · Stanford, US
• Ye Tao · Stanford, US
• Rainer Fasching · Mill Valley, US
• Ralph S. Greco · Berkeley Heights, US
• Kyle Hammerick · Palo Alto, US
• Robert Lane Smith · Palo Alto, US

Key dates

• Filing date: Sep 22, 2005
• Grant date: Nov 4, 2008
• Expiry date: Oct 23, 2025

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S977/875
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Sensors and systems for electrical, electrochemical, or topographical analysis, as well as methods of fabricating these sensors are provided. The sensors include a cantilever and one or more probes, each of which has an electrode at its tip. The tips of the probes are sharp, with a radius of curvature of less than about 50 nm. In addition, the probes have a high aspect ratio of more than about 19:1. The sensors are suitable for both Atomic Force Microscopy and Scanning Electrochemical Microscopy.