Force rebalancing and parametric amplification of MEMS inertial sensors
US7444869B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 16, 2006 |
| Grant date | Nov 4, 2008 |
| Priority date | — |
| Expiry date | Oct 16, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5726
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
MEMS devices and methods for measuring Coriolis forces using force rebalancing and parametric gain amplification techniques are disclosed. A MEMS inertial sensor can include one or more proof masses, at least one sense electrode positioned adjacent to each proof mass, a number of torquer electrodes for electrostatically nulling quadrature and Coriolis-related proof mass motion, and a number of pump electrodes for producing a pumping force on the proof masses. Force rebalancing voltages can be applied to some torquer electrodes to electrostatically null quadrature and/or Coriolis-related proof mass motion along a sense axis of the device. A pumping voltage at approximately twice the motor drive frequency of the proof masses can be used to pump the proof masses along the sense axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.