Patent · US Active

Micromachined comb capacitive accelerometer

US7444873B2 · kind B2 · utility

12Cited by

2References

14Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventor

Philippe Robert · Grenoble, FR

Key dates

Filing date	Dec 19, 2005
Grant date	Nov 4, 2008
Priority date	—
Expiry date	May 30, 2026

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2203/0136
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A comb capacitive accelerometer comprising a substrate, a mobile electrode relative to said substrate fitted with a plurality of mobile fingers, an electrode fixed relative to said substrate fitted with a plurality of fixed fingers, each of said mobile fingers being positioned between two contiguous fixed fingers so as to form a microstructure with interdigital combs. According to the invention the mobile fingers are connected to one another by at least a first connecting beam etched directly into the substrate, and/or the fixed fingers are connected to one another by at least a second connecting beam etched directly in the substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.