Transport system including vertical rollers
US7445111B2 · kind B2 · utility
1Cited by
55References
36Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 15, 2007 |
| Grant date | Nov 4, 2008 |
| Priority date | — |
| Expiry date | Jun 15, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/14
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A transport system for conveying articles along conveyance paths including straight, curvilinear, horizontal, inclined and declined conveyance sections. The articles are conveyed between a pair of vertical belts while being supported by protrusions extending from the vertical belts. The vertical belts are guided using a multiplicity of vertical rollers that are configurable into straight, curvilinear and dynamically changing conveyance sections. Multiple conveyance sections can be joined end to end to transport articles over complex paths and over long distances. The articles conveyed may include semiconductor wafers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.