Patent · US Active

Sequential wavefront sensor

US7445335B2 · kind B2 · utility

57Cited by
9References
36Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 20, 2006
Grant dateNov 4, 2008
Priority date
Expiry dateJun 29, 2026

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01J1/0437
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A sequential wavefront sensor comprises a light beam scanning module, a sub-wavefront focusing lens, a detector with more than one photosensitive area and a processor for calculating the sequentially obtained centroids of a number focused light spots from the sub-wavefronts to determine the aberration of the input wavefront. A sequential wavefront sensing method comprises the steps of; sequentially projecting a number of sub-wavefronts onto a sub-wavefront focusing lens and a detector with more than one photosensitive areas, calculating the centroid of the focused light spot from each sub-wavefront, and processing the centroid information to determine the aberration of the wavefront. In particular, a method for auto-focusing and/or auto-astigmatism-correction comprises the steps of sequentially projecting a number of sub-wavefronts around an annular ring of a wavefront to a sub-wavefront focusing lens and a detector, calculating the centroid of focused light spot from each sub-wavefront to figure out the centroid trace and hence the defocus and/or astigmatism, adjusting the focus and/or astigmatism of the optical imaging system before the wavefront sensor so that the measured defoc…

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