Producing method of electrostatic sucking type liquid jetting head, producing method of nozzle plate, driving method of electrostatic sucking type liquid jetting head, electrostatic sucking type liquid jetting apparatus and liquid jetting apparatus
US7449283B2 · kind B2 · utility
8Cited by
3References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 22, 2003 |
| Grant date | Nov 11, 2008 |
| Priority date | — |
| Expiry date | May 2, 2024 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2002/14395
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
First, through a coating step, a photolithography step and an etching step, a plurality of electrodes 142, 142, . . . are formed on a base plate 141. Next, a resist layer 143b is formed on the base plate 141 so as to cover all of the electrodes 142, 142, . . . , and by exposing and developing the resist layer 143b, a nozzle 103 having a super minute diameter is formed to stand with respect to the base plate 141 so as to make the resist layer 143b correspond to each electrode 142, and an in-nozzle passage is formed in each nozzle 103.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.