Coupled resonator filters formed by micromachining
US7449979B2 · kind B2 · utility
20Cited by
12References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 7, 2003 |
| Grant date | Nov 11, 2008 |
| Priority date | — |
| Expiry date | Aug 15, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01P11/007
- WIPO fieldTelecommunications
- WIPO sectorElectrical engineering
Abstract
A resonator filter assembly is provided having a first wafer (102), a second wafer (104) and a third wafer (106). A plurality of pits are etched in the first and second wafer (102, 104) and arranged such that a plurality of resonant cavities (108) are formed with a coupling cavity (110) disposed between the resonant cavities (108). By altering the dimensions of the resonant and coupling cavities (108, 110), the frequency characteristics of the filter can be adjusted as desired.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.