Patent · US Active

Measuring device for the measurement of optical properties of coated substrates

US7450233B2 · kind B2 · utility

0Cited by

12References

12Claims

0Family size

Assignee

Applied Materials GmbH & Co. KG · DE

Inventors

Hans-Georg Lotz · Grundau, DE
Peter Sauer · Schlüchtern, DE
Stefan Hein · Berlin, DE
Peter Skuk · Nidderau, DE

Key dates

Filing date	Nov 24, 2004
Grant date	Nov 11, 2008
Priority date	—
Expiry date	May 29, 2027

Classification

Technology area (CPC G)Physics
CPC primaryG01N21/55
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A measuring device includes several sequentially disposed coating chambers for measuring optical properties of coated substrates. These coating chambers are separated from one another by partitioning walls, whose free ends are located closely above the substrate. The substrate is preferably a continuous film. By measuring the reflection, the transmission, etc. of the substrate between the individual coating chambers, it becomes possible to carry out measurements within only partially completed layer systems. This yields advantages for the technical operation control of the coating process.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.