MEMS sensor driving device, MEMS sensor driving method, and active sensor using MEMS
US7451647B2 · kind B2 · utility
30Cited by
9References
8Claims
0Family size
Assignee
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Key dates
| Filing date | Oct 9, 2006 |
| Grant date | Nov 18, 2008 |
| Priority date | — |
| Expiry date | Dec 8, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/08
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A MEMS sensor driving device drives a MEMS sensor including a supporter provided on a surface of a substrate, an elastic member having one end connected to the supporter, and an oscillator which is supported by another end of the elastic member in a suspended state over the surface of the substrate and which is displaceable for the substrate. The MEMS sensor driving device includes a detecting unit for detecting an oscillation of the oscillator, and a feedback unit for amplifying a signal representing the oscillation detected by the detecting unit and inputting the amplified signal as a driving signal to the MEMS sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.