Dense fluid spray cleaning process and apparatus
US7451941B2 · kind B2 · utility
Inventor
Key dates
| Filing date | Mar 13, 2001 |
| Grant date | Nov 18, 2008 |
| Priority date | — |
| Expiry date | Aug 19, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/3025
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Disclosed is a dense fluid spray cleaning apparatus comprising a gas supply (3) for providing a predetermined amount of a gas to an enhanced joule-thompson condensation reactor (2) and for providing gas to a propellant generator (4), a premix chamber (6) for receiving a solid particulate from the enhanced joule thompson condensation reactor and heated gas from the propellant generator, and a mixing chamber (8) for receiving the solid particulate and the heated gas and producing a spray stream containing the solid particulate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.