Patent · US Expired

Dense fluid spray cleaning process and apparatus

US7451941B2 · kind B2 · utility

18Cited by
9References
13Claims
0Family size

Inventor

Key dates

Filing dateMar 13, 2001
Grant dateNov 18, 2008
Priority date
Expiry dateAug 19, 2023

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/3025
  • WIPO fieldChemical engineering
  • WIPO sectorChemistry

Abstract

Disclosed is a dense fluid spray cleaning apparatus comprising a gas supply (3) for providing a predetermined amount of a gas to an enhanced joule-thompson condensation reactor (2) and for providing gas to a propellant generator (4), a premix chamber (6) for receiving a solid particulate from the enhanced joule thompson condensation reactor and heated gas from the propellant generator, and a mixing chamber (8) for receiving the solid particulate and the heated gas and producing a spray stream containing the solid particulate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.