Microstructured chemical sensor

US7453254B2 · kind B2 · utility

Assignee

• PARAGON AG · DE

Inventors

• Heribert Weber · Leverkusen, DE
• Doris Schielein · Gomaringen, DE
• Christian Krummel · Kirchentellinsfurt, DE
• Christoph Schelling · Stuttgart, DE

Key dates

• Filing date: Jul 23, 2004
• Grant date: Nov 18, 2008
• Expiry date: Jul 23, 2024

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N27/128
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A chemical sensor has a substrate, a first metallization plane on the substrate, an electrode structure formed in the first metallization plane, a passivation layer applied to the first metallization plane and formed with contact holes, a sensitive ceramic layer on the passivation layer and in the contact holes, and a bond-promoting layer configured as a second metallization plane and between the passivation layer and the ceramic layer.