Micro mirrors with piezoelectric release mechanism
US7453621B2 · kind B2 · utility
4Cited by
5References
38Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 1, 2006 |
| Grant date | Nov 18, 2008 |
| Priority date | — |
| Expiry date | Jan 30, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0858
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A spatial light modulator includes a substrate; a hinge in connection with the substrate; a mirror plate that is connected with the hinge and is configured to tilt about the hinge; and a piezoelectric device coupled with the substrate. The piezoelectric device is configured to produce an acoustic wave to assist the separation between the mirror plate and the object.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.