MEMS tunable vertical-cavity semiconductor optical amplifier
US7457033B2 · kind B2 · utility
1Cited by
9References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 26, 2006 |
| Grant date | Nov 25, 2008 |
| Priority date | — |
| Expiry date | May 26, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/18366
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A MEMS-tunable semiconductor optical amplifier (SOA). A device in accordance with the present invention comprises a substrate, a first mirror, coupled to the substrate, a second mirror, an active region, coupled between the first and second mirror, and a microelectromechanical actuator, coupled to the second mirror, wherein a voltage is applied to the microelectromechanical actuator to tune the SOA.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.