Automated, modular approach to assigning semiconductor lots to tools
US7457681B2 · kind B2 · utility
1Cited by
3References
24Claims
0Family size
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Key dates
| Filing date | Mar 31, 2006 |
| Grant date | Nov 25, 2008 |
| Priority date | — |
| Expiry date | Mar 31, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
The operation of a semiconductor fabrication facility may be automated to enable efficient assignments of lots to specific process tools or entities. This may involve the use of an algorithm which may have aspects which are common across various process areas within the fabrication facility. However, the algorithm may be customized to meet the needs of specific process areas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.