Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
US7458263B2 · kind B2 · utility
71Cited by
28References
27Claims
0Family size
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Key dates
| Filing date | Nov 18, 2005 |
| Grant date | Dec 2, 2008 |
| Priority date | — |
| Expiry date | Nov 18, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/574
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A dual-axis sensor for measuring X and Y components of angular velocity in an X-Y sensor plane is provided. The dual-axis sensor includes a first subsensor for measuring the X component of angular velocity, and a second subsensor for measuring the Y component of angular velocity. The first subsensor and the second subsensor are contained within a single hermetic seal within the dual-axis sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.