Modular fluid distribution system
US7458397B2 · kind B2 · utility
Inventor
Key dates
| Filing date | Jul 9, 2004 |
| Grant date | Dec 2, 2008 |
| Priority date | — |
| Expiry date | Jul 9, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87885
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A modular system for enabling a distribution of fluids, including a plurality of individual fluid path blocks that can be joined to substrate plates and component interfacing blocks to form gas sticks and gas panels. Each gas path block will have a fluid passageway with an entrance port and exit port accessing a common surface. Active components are mounted to the interfacing blocks, with each gas path block extending and interconnecting across immediately adjacent components in a stick or immediately adjacent sticks. Alignment features are provided to ensure that entrance and exit ports are accurately positioned to facilitate sealing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.