Mass spectrometer for trace gas leak detection with suppression of undesired ions
US7459677B2 · kind B2 · utility
4Cited by
18References
8Claims
0Family size
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Key dates
| Filing date | Feb 15, 2006 |
| Grant date | Dec 2, 2008 |
| Priority date | — |
| Expiry date | Oct 1, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/30
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Mass spectrometers for trace gas leak detection and methods for operating mass spectrometers are provided. The mass spectrometer includes an ion source to ionize trace gases, such as helium, a magnet to deflect the ions and a detector to detect the deflected ions. The ion source includes an electron source, such a filament. The method includes operating the electron source at an electron accelerating potential relative to an ionization chamber sufficient to ionize the trace gas but insufficient to form undesired ions, such as triply charged carbon.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.