Process for the observation of at least one sample region with a light raster microscope

US7459698B2 · kind B2 · utility

Assignee

• Carl Zeiss Micromanaging GmbH · DE

Inventors

• Ralf Engelmann · Jena, DE
• Joerg-Michael Funk · Arth, CH
• Joerg Steinert · Jena, DE
• Bernhard Zimmermann · Großenhain, DE
• Stefan Wilhelm · Unterhaching, DE
• Joerg Engel · Triebes, DE
• Ulrich Meisel · Jena, DE

Key dates

• Filing date: Nov 1, 2006
• Grant date: Dec 2, 2008
• Expiry date: Nov 1, 2026

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B21/0048
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

Process for the observation of at least one sample region with a light raster microscope by a relative movement between the illumination light and sample via a first scanner along at least one scanning axis essentially perpendicular to the illumination axis wherein at an angle to the plane of the relative movement, preferably perpendicular thereto a second scanner is moved and an image acquisition takes place by the movement of the first and second scanners being coupled and a three-dimensional sampling movement being done by the illumination of the sample wherein the second scanner is coupled to the movement of the first scanner in such a manner that straight and/or curved lines and/or plane and/or curved surfaces are scanned which are extended along at least one scanning direction of the first scanner as well as along the scanning direction of the second scanner.