X-Y stage driver having locking device and data storage system having the X-Y stage driver
US7459809B2 · kind B2 · utility
0Cited by
3References
9Claims
0Family size
Assignee
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Key dates
| Filing date | Oct 18, 2006 |
| Grant date | Dec 2, 2008 |
| Priority date | — |
| Expiry date | Jan 6, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q80/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An X-Y stage driver having a locking device and a data storage system having the X-Y stage driver. The X-Y stage driver includes an X-Y stage; a supporting unit that supports the X-Y stage and has elastic beams that support corners of the X-Y stage; a driving unit that drives the X-Y stage in a first direction and a second direction which is perpendicular to the first direction; a stiffener that prevents the X-Y stage from rotating; and a locking device that fixes the stiffener by an electrostatic force.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.