Patent · US Active

Deviation angle self compensating substantially achromatic retarder

US7460230B2 · kind B2 · utility

106Cited by

10References

21Claims

0Family size

Assignee

J.A. WOOLLAM CO., INC. · US

Inventors

Blaine D. Johs · Lincoln, US
Steven E. Green · Lincoln, US
Craig M. Herzinger · Lincoln, US
Duane E. Meyer · Lincoln, US

Key dates

Filing date	Oct 31, 2006
Grant date	Dec 2, 2008
Priority date	—
Expiry date	Aug 16, 2027

Classification

Technology area (CPC G)Physics
CPC primaryG02B27/286
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A substantially achromatic multiple element compensator system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems. Multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.