Quartz crystal microbalance humidity sensor
US7461539B2 · kind B2 · utility
3Cited by
3References
13Claims
0Family size
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Key dates
| Filing date | May 17, 2004 |
| Grant date | Dec 9, 2008 |
| Priority date | — |
| Expiry date | May 20, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/101
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A humidity sensor and a quartz crystal microbalance (QCM) therefor, for measuring low humidity levels, and a method for preparing same. The metallic surface of the QCM is electroplated with a hygroscopic layer. The hygroscopic layer preferably includes Manganese. A salt is formed on the hygroscopic layer. The salt is preferably salt of Manganese, and most preferably Manganese Chloride (MnCl2).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.