Uniform pressing apparatus for use in a micro-nano imprint process
US7462029B1 · kind B1 · utility
Inventors
Key dates
| Filing date | Oct 22, 2007 |
| Grant date | Dec 9, 2008 |
| Priority date | — |
| Expiry date | Oct 22, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S425/019
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
A uniform pressing apparatus includes upper and lower pressing units and a mold. The lower pressing unit includes a supporting container, a pressure equalizing liquid received within an upwardly opening accommodating space in the container, and pressurizing equipment including a piston member extending into the accommodating space and operable to push the pressure equalizing liquid upwardly in an axial direction toward a substrate disposed on an annular top surface of the container. The upper pressing unit is movable to allow for contact between the mold and the substrate. Subsequently, the piston member is moved to press the substrate against the mold.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.