Radially actuated micro-electromechanical nozzle arrangement
US7465029B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 4, 2008 |
| Grant date | Dec 16, 2008 |
| Priority date | — |
| Expiry date | Feb 4, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49401
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
This invention relates to a micro-electromechanical nozzle arrangement for an inkjet printhead. The arrangement includes a substrate having a layer of drive circuitry and defining an ink chamber with an ink supply channel etched through the substrate. The arrangement also includes a roof structure connected to the drive circuitry layer and covering the ink chamber, the roof structure defining a fluid ejection nozzle rim above said chamber. Also included is a plurality of actuators radially spaced about, and displaceable with respect to, the nozzle rim, each actuator configured to thermally expand upon receiving current from the drive circuitry thereby moving said actuators into the chamber and operatively increasing a fluid pressure inside the chamber to eject a drop of ink via the ejection nozzle. The substrate defines a number of vias through which the drive circuitry is connected to the actuators.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.