Method of recycling inert gas
US7465476B2 · kind B2 · utility
0Cited by
10References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 8, 2005 |
| Grant date | Dec 16, 2008 |
| Priority date | — |
| Expiry date | Mar 31, 2026 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D2257/80
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for recycling an inert gas evacuated from a material deposition process chamber 10 comprises cooling the evacuated inert gas and recirculating a proportion of the cooled gas to the chamber 10 at a first temperature for use as a cooling gas in the material deposition process 12, and recirculating a proportion of the cooled gas to the chamber 10 at a second temperature for use as a shielding gas in the material deposition process 12, the second temperature being higher than the first temperature. Apparatus 22 for recycling an inert gas is also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.