Method for producing smooth, dense optical films
US7465681B2 · kind B2 · utility
12Cited by
6References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 25, 2006 |
| Grant date | Dec 16, 2008 |
| Priority date | — |
| Expiry date | Jun 21, 2027 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/22
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The invention is directed to preparing optical elements having a thin, smooth, dense coating or film thereon, and a method for making such coating or film. The coated element has a surface roughness of <1.0 nm rms. The coating materials include hafnium oxide or a mixture of hafnium oxide and another oxide material, for example silicon dioxide. The method includes the use of a reverse mask to deposit the coating or film on a rotating substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.