MEMS based current sensor using magnetic-to-mechanical conversion and reference components
US7466121B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 18, 2006 |
| Grant date | Dec 16, 2008 |
| Priority date | — |
| Expiry date | Aug 18, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R33/0286
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micro-electromechanical system (MEMS) current sensor is described as including a first conductor, a magnetic field shaping component for shaping a magnetic field produced by a current in the first conductor, and a MEMS-based magnetic field sensing component including a magneto-MEMS component for sensing the shaped magnetic field and, in response thereto, providing an indication of the current in the first conductor. A method for sensing a current using MEMS is also described as including shaping a magnetic field produced with a current in a first conductor, sensing the shaped magnetic field with a MEMS-based magnetic field sensing component having a magneto-MEMS component magnetic field sensing circuit, and providing an indication of the current in the first conductor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.