Micromechanical device with tilted electrodes

US7466474B2 · kind B2 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Denis Jung · Dresden, DE
• Christian Drabe · Dresden, DE
• Harald Schenk · Dresden, DE
• Thilo Sandner · Dresden, DE
• Thomas Klose · Althengstett, DE

Key dates

• Filing date: Mar 31, 2008
• Grant date: Dec 16, 2008
• Expiry date: Mar 31, 2028

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B26/0866
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A micromechanical device includes a micromechanical functional structure, which can be deflected about a main axis from a rest position, a movable electrode, which is mounted to the micromechanical functional structure, and a fixed electrode, which can be tilted about a tilting axis with respect to the movable electrode in the rest position, wherein the tilting axis is parallel to the main axis or is identical with the main axis.