Method and apparatus for an elevator system for a multilevel cleanspace fabricator
US7467024B2 · kind B2 · utility
54Cited by
70References
20Claims
0Family size
Inventor
Key dates
| Filing date | Aug 26, 2006 |
| Grant date | Dec 16, 2008 |
| Priority date | — |
| Expiry date | May 17, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67775
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention provides methods and apparatus capable of routine placement and replacement of fabricator tools in a designated tool location. The tool location can be selected from multiple tool locations arranged in a matrix with horizontal and vertical designations. In another aspect, the fabricator tool placement and replacement can be accomplished while maintaining a clean space environment about the fabricator tool.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.