Capacitively coupled resonator drive
US7467553B2 · kind B2 · utility
9Cited by
16References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 22, 2005 |
| Grant date | Dec 23, 2008 |
| Priority date | — |
| Expiry date | Jan 25, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/125
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and method for a micro-machined device having a movable mass rotatably suspended from a frame by one or more hinges for rotation relative thereto frame. A DETF resonator is suspended between the frame and reaction mass, and a capacitor is provided between the frame and movable mass for transmitting a drive signal to the DETF resonator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.