Patent · US Expired

Single stage charged particle beam energy width reduction system for charged particle beam system

US7468517B2 · kind B2 · utility

3Cited by

2References

27Claims

0Family size

Assignee

ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH · DE

Inventors

Jürgen Frosien · Riemerling, DE
Ralf Degenhardt · Landsham, DE
Stefan Lanio · Erding, DE
Gerald Schonecker · Munich, DE

Key dates

Filing date	Sep 2, 2004
Grant date	Dec 23, 2008
Priority date	—
Expiry date	Jun 2, 2025

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2801
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

The present invention provides a charged particle beam device. The device comprises a first lens generating a crossover a second lens positioned after the crossover and an element acting in a focusing and dispersive manner in an x-z-plane with a center of the element having essentially same z-position as the crossover. Further, a multipole element, which acts in the x-z-plane and a y-z-plane is provided. A first charged particle selection element and a second charged particle selection element are used for selecting a portion of the charged particles. Thereby, e.g. the energy width of the charged particle beam can be reduced.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.