Scanner and method for operating a scanner

US7469834B2 · kind B2 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Uwe Schelinski · Dresden, DE
• Michael Scholles · Dresden, DE
• Alexander Wolter · Dresden, DE

Key dates

• Filing date: Jan 17, 2006
• Grant date: Dec 30, 2008
• Expiry date: Aug 25, 2026

Classification

• Technology area (CPC G): Physics
• CPC primary: G01B11/24
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A scanner for providing a possibility of detecting a surface relief of an object includes a projector configured to guide a light beam in an illumination line over the surface relief to obtain an illuminated location on the surface relief, the projector being further configured to output a projection signal from which a position of the light beam in the illumination line is derivable. Additionally, the scanner includes a collector having a collector micro mirror stimulatable to oscillate in two dimensions and a point-shaped light detector, the collector micro mirror being oscillatingly arranged in a first direction of the illumination line and in a second direction differing from the first direction such that a reflection of the illuminated location within a scan area of the micro scanner mirror is imagable by it onto the point-shaped light detector, and the collector being configured to output a detection signal from which a position of the illuminated location in the first and second directions is derivable.