Manufacturing method and manufacturing apparatus of magnetic recording medium
US7470374B2 · kind B2 · utility
9Cited by
19References
12Claims
0Family size
Assignee
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Key dates
| Filing date | Jul 28, 2004 |
| Grant date | Dec 30, 2008 |
| Priority date | — |
| Expiry date | Jul 20, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B5/855
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A manufacturing method of a magnetic recording medium, and the like are provided, which can suppress misalignment of a processed shape of divided recording elements and magnetic degradation and can efficiently manufacture a magnetic recording medium having good magnetic characteristics. In the manufacturing method, ion beam etching is used as a dry etching technique for a continuous recording layer 20. Before dry etching of the continuous recording layer 20, a resist layer 26 is removed. As the material for a first mask layer covering the continuous recording layer, diamond like carbon is used.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.